Integrated spectral cell

Abstract:

Aspects of the present disclosure relate to an integrated spectroscopy cell comprising a micro-electromechanical system (MEMS) interferometer fabricated within a first substrate and a light redirecting structure integrated on a second substrate, wherein the second substrate is coupled to the first substrate. The light redirecting structure includes at least one mirror for receiving an input light beam propagating in an out-of-plane direction relative to the first substrate and redirecting the input light beam to an in-plane direction relative to the first substrate toward the MEMS interferometer.