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Self calibration for mirror positioning in optical MEMS interferometers

Abstract:

Images

JP 2018530588

united states
download pdf
inventor: 
アンワル,モーメンメダット,モスタファモルタダ,バセムシャター,アハメド,オスマン エルシャター,アハメド,オスマン エルシーフ,ミナ ガッドシーフ,ミナ ガッドナギイ,ムハメッドサダニイ,バサム,エイ.ハフェズ,アムール,エヌ.
current assignee: 
Si Ware Systems SI Ware Systems Inc
Status: 
Granted
Status Date: 
June 17, 2020
domain: 
Si Ware Systems SI Ware Systems Inc
worldwide applications: 
2015 . us us . 2026 . kr au ca wo es ep cn mx jp . 2017 . us us 2018 . il

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