Integrated apertured micromirror and applications thereof

Abstract:

A kind of MEMS (MEMS) interferometer provides the self calibration of the speculum positioning of movable mirror.Movable mirror is coupled to the MEMS actuator with variable capacitance.MEMS interferometers are included for determining in the capacitance sensing circuit of the capacitance of the MEMS actuator of two or more known positions of movable mirror and for the actuator capacitance in known position to be used to carry out the calibration module of any drift in compensating electric capacity sensing circuit.