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COMPENSATED MEMS FT-IR SPECTROMETER ARCHITECTURE

Abstract:

A Micro Electro-Mechanical System (MEMS) spectrometer architecture compensates for verticality and dispersion problems using balancing interfaces. A MEMS spectrometer/interferometer includes a beam splitter formed on a first surface of a first medium at an interface between the first medium and a second medium, a first mirror formed on a second surface of the first medium, a second mirror formed on a third surface of the first medium and balancing interfaces designed to minimize both a difference in tilt angles between the surfaces and a difference in phase errors between beams reflected from the first and second mirrors.

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united states
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inventor: 
Diaa A. Khalil, Bassem Mortada, Mohamed Nabil, Mostafa Medhat, Bassam A. Saadany
current assignee: 
SI Ware Systems SAE SI Ware Systems Inc
Status: 
Allowed
Status Date: 
September 10, 2013
domain: 
SI Ware Systems SAE SI Ware Systems Inc
worldwide applications: 
2015 . us us . 2026 . kr au ca wo es ep cn mx jp . 2017 . us us 2018 . il

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