Micro electromechanical system (MEMS) interferometer

Abstract:

This invention relates generally to spectroscopy and interferometry, and more particularly to the use of Micro Electro-Mechanical Systems (MEMS) in optical spectrometers. Micro-electromechanical system (MEMS) refers to the integration of mechanical elements, sensors, actuators and electronics provided on a common silicon substrate, typically by microfabrication techniques. For example, microelectronics are typically manufactured using integrated circuit (IC) processes, and micromechanical components are mechanically and mechanically added by selectively etching away portions of a silicon wafer and adding new structural layers. Manufactured using a microfabrication process that forms electromechanical components. MEMS devices offer spectroscopy, profilometry (shape measurement), environmental sensing, refractive index measurement (material recognition) and other sensors due to their low cost, batch processability, and compatibility with standard microelectronics. An attractive candidate for use in the field. Furthermore, because the MEMS devices are small in size, they can be easily integrated into mobile (mobile) devices and handheld devices.