Integrated optical probe card and system for batch testing of optical MEMS structures with in-plane optical axis using micro-optical bench components

Abstract:

Aspects of the present disclosure relate to an integrated optical probe card and system for performing wafer testing of optical micro-electro-mechanical systems (MEMS) structures having in-plane optical axes. On-wafer optical masking of optical MEMS structures may be performed with one or more micro-optical platform assemblies to redirect light between an out-of-plane direction perpendicular to an in-plane optical axis and an in-plane direction parallel to the in-plane optical axis to enable testing of the optical MEMS structures by vertical injection of light.