Integrated device for fluid analysis

Abstract:

The following presents a summary of one or more aspects of the present disclosure, in order to provide a basic understanding of such aspects. This summary is not an extensive overview of all contemplated features of the disclosure, and is intended neither to identify key or critical elements of all aspects of the disclosure nor to delineate the scope of any or all aspects of the disclosure. Its sole purpose is to present some concepts of one or more aspects of the disclosure in a form as a prelude to the more detailed description that is presented later. Various aspects of the disclosure relate to miniaturized gas cells fabricated using semiconductor technology. The miniaturized gas cell may be a multi-pass gas cell or a hollow waveguide gas cell. In some aspects, the miniaturized gas cell may include a bottom surface and sidewalls formed in a substrate (e.g., a silicon substrate or silicon on insulator (SOI) substrate). In some examples, the bottom surface and/or sidewalls may be coated with a reflective material, such as a metal or dielectric coated metal. In other examples, the bottom surface and/or sidewalls may include silicon Bragg mirrors. The gas cell further includes at least one gas inlet and at least one gas outlet coupled for injection of a fluid, such as a gas, liquid, or plasma, into and out of the gas cell, respectively. In addition, the gas cell further includes an optical input and an optical output, each optically coupled to direct light into and out of the gas cell, respectively. The light may be guided in the gas cell by at least the bottom surface and the sidewalls.