A TECHNIQUE TO DETERMINE MIRROR POSITION IN OPTICAL INTERFEROMETERS

Abstract:

Micromechanical system (MEMS) interferometer systems utilize a capacitive sensing circuit to determine the position of the movable mirror. An electrostatic MEMS actuator is coupled to the movable mirror to cause displacement of the movable mirror. The capacitance detection circuit detects the current capacitance of the MEMS actuator and determines the position of the movable mirror based on the current capacitance of the MEMS actuator.